Morgan Advanced Materials provides extended Electrostatic Chuck life through replaceable, wear-resistant films
Morgan Advanced Materials announces new solutions in sacrificial wear layers to extend the life of alumina or beryllia electrostatic chucks (ESCs) for semiconductor, solar and LED applications. Applied as a final protective layer, the DiamonexÃ’ technical hard-coats offer extended life benefits to new or refurbished ESCs.
These thin, wear-resistant films, made of diamond-like-carbon (DLC) and other nanocomposite materials, are adjusted to meet specific resistivity requirements of the ESC while protecting electronic layers and extending the overall life of the part. They have a broad range of chemical resistance, meet chamber process compatibility requirements, and can withstand high-temperature heated chuck applications.
The hard-coats can be applied to new or refurbished ESCs, even for ESCs originally designed without a sacrificial wear layer. The technical films are available for CVD, PVD, etch and ion implant processes. The films feature mesa patterning for low defectivity and can be used in most high temperature processes.
For more information about our sacrificial wear layers for electrostatic chucks please visit: http://www.diamonex.com/wearlayers.
About Morgan Advanced Materials
Morgan Advanced Materials is a global materials engineering company which designs and manufactures a wide range of high specification products with extraordinary properties, across multiple sectors and geographies.
From an extensive range of advanced materials we produce components, assemblies and systems that deliver significantly enhanced performance for our customers products and processes. Our engineered solutions are produced to very high tolerances and many are designed for use in extreme environments.
The Company thrives on breakthrough innovation. Our materials scientists and applications engineers work in close collaboration with customers to create outstanding, highly differentiated products that perform more efficiently, more reliably and for longer.
Technical Ceramics is a business of Morgan Advanced Materials, which has more than 9,000 employees across 50 countries serving specialist markets in the energy, transport, healthcare, electronics, security and defence, petrochemical and industrial sectors. Morgan Advanced Materials (MGAM) is listed on the London Stock Exchange in the engineering sector.
Featured Product
3D Vision: Ensenso B now also available as a mono version!
This compact 3D camera series combines a very short working distance, a large field of view and a high depth of field - perfect for bin picking applications. With its ability to capture multiple objects over a large area, it can help robots empty containers more efficiently. Now available from IDS Imaging Development Systems. In the color version of the Ensenso B, the stereo system is equipped with two RGB image sensors. This saves additional sensors and reduces installation space and hardware costs. Now, you can also choose your model to be equipped with two 5 MP mono sensors, achieving impressively high spatial precision. With enhanced sharpness and accuracy, you can tackle applications where absolute precision is essential. The great strength of the Ensenso B lies in the very precise detection of objects at close range. It offers a wide field of view and an impressively high depth of field. This means that the area in which an object is in focus is unusually large. At a distance of 30 centimetres between the camera and the object, the Z-accuracy is approx. 0.1 millimetres. The maximum working distance is 2 meters. This 3D camera series complies with protection class IP65/67 and is ideal for use in industrial environments.
